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Experimental results of laser-induced deposition of structured metal films from metalloorganic vapor have been analyzed. A new physical model has been put forward to explain the results. The model is based on the interference phenomena between the incident laser radiation and waveguide modes of a thermally induced gradient waveguide in the substrate. Keywords: femtosecond radiation, metal deposition, interference, waveguide modes, surface nanogratings.

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Nanogratings Formation in a System of Ultra-short Laser Pulses – Metalloorganic Gas – Deposited Metal – Sapphire in Sinergetic Interference Field with Waveguide Modes Participation