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1New Industry Creation Hatchery Center (NICHe), Tohoku University, 6-6-10 Aramaki-Aoba, Aoba-ku Sendai, Miyagi 980-8579, Japan 2Sendai Smart Machine Co., Ltd. (SSM), 6-6-40 Aza-Aoba, Aramaki, Aoba-ku, Sendai, Miyagi 980-8579, Japan 3Institute of Science and Engineering, Faculty of Frontier Engineering, Kanazawa University, Kakuma-machi, Kanazawa 920-1192, Japan 4Advanced Institute for Materials Research, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan 5ELyTMaX UMI 3757, CNRS – Université de Lyon – Tohoku University, International Joint Unit, Tohoku University, 2-1-1 Katahira, Aoba-ku, Sendai, Miyagi 980-8577, Japan

Pb52(Zr,Ti)48O3 Ferroelectric Dipole Electret Exploiting Surface Pillar Array Structure for Electrostatic Vibration Energy Harvesters