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An IoT force sensor module was fabricated and demonstrated in a five-day practical program for students, as part of the Nanotechnology Platform Japan project. The module mainly consists of a silicon-based piezoresistive micro-electromechanical system (MEMS) force sensor and a microcontroller with a WiFi wireless communication function. The MEMS force sensor was fabricated on a 4-inch silicon wafer in four days by each student. The IoT force sensor module was connected to an IoT cloud server via the internet and was successfully monitored by a smartphone. All of the fabrication, implementation, and testing processes were carried out by students at Hands-On-Access Fabrication Facility, Tohoku University.

Fabrication of IoT Force Sensor Module in Five-day Program for Students as Part of Nanotechnology Platform Japan Project