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1Department of Mechanical Engineering, Aichi Institute of Technology, 1247 Yachigusa, Yakusa, Toyota, Aichi 470-0392, Japan 2Department of Mechanical Engineering, University of Hyogo, 2167 Shosha, Himeji, Hyogo 671-2201, Japan 3Sinko Seiki Co., Ltd., 1-35-3 Takatsukadai, Nishi, Kobe, Hyogo 651-2271, Japan 4The New Industry Research Organization, 1-5-2 Minatojima Minamimachi, Chuo, Kobe, Hyogo 650-0047, Japan

Design and Development of Fan-shaped Silicon Resonators for Young's Modulus Measurement