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1Ph.D. Program, Graduate Institute of Precision Manufacturing, National Chin-Yi University of Technology, Taichung County 411, Taiwan, R.O.C. 2Graduate Institute of Automation Technology, National Taipei University of Technology, 1, Sec. 3, Zhongsiao E. Road, Taipei 10608, Taiwan, R.O.C. 3Department of Industrial Education and Technology, National Changhua University of Education, Bao-Shan Campus, Number 2, Shi-Da Road, Changhua 500, Taiwan, R.O.C.

Analysis of Pull-in Characteristics of Double-clamped Nanobeam Incorporating Casimir and van der Waals Effects