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1Department of Mechanical Engineering, Pohang University of Science and Technology, 77 Cheongam-ro, Nam-gu, Pohang, Gyeongsangbuk-do 37673, Republic of Korea 2Standing Egg Inc., Twosun World Building 7F, 221 Pangyoyeok-ro, Bundanggu, Seongnam-si, Gyeonggi-do 13494, Republic of Korea 3Department of Mechanical & Automotive Engineering, Kongju National University, 1223-24 Cheonan Daero, Seobuk-gu, Cheonan-si, Chungnam 31080, Republic of Korea

Design, Analysis and Experimental Results of Micromachined Single-structure Triaxis Vibratory Gyroscope with Advanced Coupling Mechanism