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1Science and Technology on Micro-System Laboratory, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China 2University of Chinese Academy of Sciences, Beijing 100049, China 3State Key Laboratory of Functional Materials for Informatics, Shanghai Institute of Microsystem and Information Technology, Chinese Academy of Sciences, Shanghai 200050, China

Ultra-narrowband Emitters/Absorbers Based on Metal–Insulator–Metal Stacks for Nondispersive Infrared Gas Sensors