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1Hangzhou Dianzi University Information Engineering School, Hangzhou 310018, China 2The Key Laboratory of RF Circuits and System of Ministry of Education, College of Electronic and Information, Hangzhou Dianzi University, Hangzhou 310018, China 3State Key Laboratory of Functional Materials for Informatics, Chinese Academy of Sciences, Shanghai 200050, China 4State Key Laboratory for Manufacturing Systems Engineering, Xi’an Jiaotong University, Xi’an 710049, China

Inclination Effects on Voltage-controlled Tuning of MEMS Disk Resonator Array Composite Fabricated by Deep Reactive Ion Etching Process