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Department of Electronic Engineering, Cheng Shiu University, No. 840, Chengcing Road, Niaosong District, Kaohsiung City 83347, Taiwan 1Institute of Microelectronics, Department of Electrical Engineering Center for Micro/Nano Science and Technology, Advanced Optoelectronic Technology Center, National Cheng Kung University, No. 1, University Road, Tainan City 701, Taiwan 2Department of Electronics Engineering and Computer Sciences, Tung Fang Design Institute, No. 110, Dongfang Road, Hunei District, Kaohsiung City 82941, Taiwan

High Responsivity in GaN Ultraviolet Photodetector Grown on a Periodic Trapezoid-Column Patterned Sapphire Substrate