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Dielectric laser acceleration of electrons has recently been demonstrated with significantly higher accelerating gradients than other structure-based linear accelerators. Towards the development of an integrated 1MeV electron accelerator based on dielectric laser accelerator technologies, development in several relevant technologies is needed. In this work, recent developments on electron sources, bunching, accelerating, focussing, deflecting and laser coupling structures are reported. With an eye to the near future, components required for a 1MeV kinetic energy tabletop accelerator producing sub-femtosecond electron bunches are outlined.

Towards a Fully Integrated Accelerator on a Chip: Dielectric Laser Acceleration (DLA) From the Source to Relativistic Electrons