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Researched the parameters of the microstructures, obtained by laser termochemical space recording in films of molybdenum with a thickness of 17, 35 and 70 nm, deposited on a glass and quartz substrates. Graphs of the spatial resolution of the microstructures as a function of the laser power are plotted for different substrate materials. It is shown that a higher spatial resolution of the microstructures can be achieved in the molybdenum films with a 17 nm thickness.

The research of the properties of thin films of molybdenum to form the contact masks for diffractive optics elements