Open AccessThree-Dimensional Microelectromechanical Systems (MEMS) Structures Assembled from Polysilicon Surface Micromachined Elements Containing Continuous Hinges and Microrivets
Author(s) -
Edward S. Kolesar,
Matthew D. Ruff
Publication year - 2021
Publication title -
2006 gsw proceedings
Language(s) - English
Resource type - Conference proceedings
DOI - 10.18260/1-2-620-38510
Subject(s) - microelectromechanical systems , hinge , surface micromachining , materials science , optoelectronics , surface (topology) , electronic engineering , fabrication , nanotechnology , mechanical engineering , engineering , geometry , medicine , mathematics , pathology , alternative medicine
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