Open AccessDesign and Operation of a MEMS Microengine Fabricated from Asymmetrical Polysilicon Surface Micromachined Electrothermal Microactuators
Author(s) -
Alfred Jayachandran,
Edward S. Kolesar
Publication year - 2021
Publication title -
2006 gsw proceedings
Language(s) - English
Resource type - Conference proceedings
DOI - 10.18260/1-2-620-38490
Subject(s) - microelectromechanical systems , surface micromachining , materials science , optoelectronics , comb drive , surface (topology) , silicon , bulk micromachining , electrical engineering , electronic engineering , fabrication , engineering , alternative medicine , geometry , medicine , pathology , mathematics
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