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Carbon nanotubes (CNTs) have been grown by the decomposition of C 2H2 over thin catalyst film in order to investigate the growth mechanism of CNTs by chemical vapor deposition (CVD).The catalyst was prepared from an iron chloride FeCl 3 precursor solution that was spin – coated on SiO 2 substrate. The growth mechanism and the length and the diameter of the CNTs were greatly influenced by the precursor concentration, the time deposition and the temperature and the ratio of C 2H2:N 2 are fixed. Transmittance electron microscopy and Scanning electron microscopy and Raman spectroscopy and X-ray diffraction have been carried out in order to investigate the behavior of the growth process. The iron chloride film contact with the C 2H2:N 2 reaction atmosphere.

Synthesis of Carbon Nanotubes by CVD over Fe Catalyst Prepared in Spin Coating on SiO<sub>2</sub>/p-Si(100)