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Based on the forthcoming six degree of freedom simultaneous measurement and research, a basic platform is set up, and a four degree of freedom simultaneous measuring instrument is developed. The instrument uses a semiconductor laser single mode fiber component as the light source, which effectively reduces the light drift of the laser itself. A high precision and high stability measurement reference ray is provided for the measurement of straightness and angle. Using the pyramid prism as a sensitive unit and reflecting beam backward, the structure volume of the instrument is reduced. The four-quadrant detector and position sensitive detector are used as photoelectric detection devices. The four-degree of freedom (straightness of X and Y direction, deflection angle and pitch angle) of the machine tool guide is measured at the same time by collecting and processing data through single chip microcomputer (SCM).

FOUR DEGREE OF FREEDOM MEASURING INSTRUMENT FOR PRECISION MACHINERY BASED ON SEMICONDUCTOR LASER OPTICAL FIBER COMPONENTS