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The purpose is to study the circuit design based on capacitive micromechanical gyroscope. In order to detect a very weak angular rate signal, the signal needs to be properly amplified and demodulated. To this end, an improved continuous-time front-end readout circuit is proposed. The front-end structure is a charge-sensitive amplifier (CSA) with a T-resistor network as a feedback resistor. In order to reduce the noise of the front-end amplifier, the size of the input transistor is optimized accordingly. In addition, in the demodulation process, the comparator demodulation clock signal usually has a certain phase shift. Therefore, this will cause errors in the output signal. For this problem, a simple and effective error correction algorithm is put forward. By the validation of simulation, the results show that the error rate is reduced from 13.7% to 0.3% after the error correction algorithm. Therefore, it can be concluded that the circuit can correctly demodulate the angular rate signal. The algorithm can effectively reduce the error caused by demodulation.

CIRCUIT DESIGN BASED ON CAPACITIVE MICROMECHANICAL GYROSCOPE