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The Ga doped ZnO thin films were deposited on preheated amorphous glass substrates using spray pyrolysis technique. The structural properties of Ga doped ZnO thin films produced by the spray pyrolysis method at 450 C substrate temperature are studied. The films exhibit a dominant peak at 2θ = 34.44 corresponding to the (002) plane of ZnO. A uniform grain growth in all the film samples is observed from the SEM and TEM micrographs.

Structural, Morphological and Acetone Sensing Properties of Ga doped ZnO Thin Films by Spray Pyrolysis