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The objective of this work was to investigate the possibility of taper angle correction in cutting of complex micro-mechanical contours using a TruMicro ultra-short pulse laser in combination with the SCANLAB precSYS micro machining sub system. In a first step, the influence of the process parameters on the kerf taper angle of metallic alloys was systematically investigated without beam inclination. A set of base parameters was derived for the subsequent investigations. In a second step, the kerf taper angle was controlled by static beam inclination. In a third step, the same optics was used in its dynamic precession mode to fabricate micro-mechanical components of complex contours with perpendicular 0° taper angles. It was found that taper angle adjustments of up to 7.5° are possible with the used setup for cutting applications. Taper angle control is possible both in the static beam inclination mode and in the dynamic precession mode. The static mode could be interesting for contours with sharp inner radii and for achieving faster cutting times similar to results with fixed optics, but would require excellent synchronization of beam inclination and axis motion. The dynamic precession mode would allow an easier integration of the optics into a laser machine but will result in longer cutting times and limitations with respect to achievable inner radii.

Taper Angle Correction in Cutting of Complex Micro-mechanical Contours with Ultra-Short Pulse Laser