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Tantalum pentoxide (Ta2O5) was sintered with spark-plasma sintering (SPS) using a commercial powder with micometric particles composed of nanometric crystallites. The influence of the SPS process and subsequent annealing on the microstructure, phase composition and dielectric properties was studied. After the sintering, the product was oxygen deficient because of the low pressure in the sintering chamber. Evacuation was necessary for the process because of the carbon pistons and carbon die used for the powder compaction. After the subsequent annealing in air, the white color of Ta2O5 was restored, being a proper indication of a re-oxidation. Dielectric properties were studied in a broad range of frequencies and temperatures. As-sintered and also annealed samples exhibited a high relative permittivity in a range of 61–68, a loss factor of about 0.001 and a resistivity in the order of 10 m.

Tantalum oxide dielectrics processed with spark-plasma sintering