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When attempting to automate Auger spectra analyses it becomes necessary to have a deeper knowledge of the constituent elements of the spectra. In order to obtain a reliable analysis, the unavoidable spectral noise must be reduced, thus giving a clearer view to the spectral peaks and the spectral background. Therefore, the necessary step is to analyze the spectral noise and to find a way to evaluate the noise-reduction algorithms. A method in which simulated Auger electron spectra are used for testing the efficiency of noise-reduction routines has been proposed. The performance of noise-reduction procedures on measured spectra cannot be evaluated since the intrinsic noiseless spectra is never available for reference; therefore, the spectra were simulated and the noise-reduction routines were used on the simulated spectra. After the processing, the simulated noiseless spectrum is subtracted from the complete spectrum, leaving the remaining noise for further analysis and a comparison with the exactly known simulated noise. For each spectrum data point the noise ratios are calculated by dividing the remaining noise levels by the initial noise. When plotting the noise ratios for each respective processing route, it was found that most of the noise ratios lie in the interval –1 to +1, indicating an improvement in regard to the initial noise. Such a plot of the noise ratios offers a convenient way for assessing the efficiency of the noise-reduction routine at a glance.

Using simulated spectra to test the efficiency of spectral processing software in reducing the noise in Auger electron spectra