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In this work, simulation of the singly charged argon ion trajectories for a variable plasma meniscus is studied with and without space charge for the triode extraction system by using SIMION 3D (Simulation of Ion Optics in Three Dimensions) version 7 personal computer program. The influence of acceleration voltage applied to the acceleration electrode of the triode extraction system on the shape of the plasma meniscus has been determined. The plasma electrode is set at +5000 volt and the acceleration voltage applied to the acceleration electrode is varied from -5000 volt to +5000 volt. In the most of the concave and convex plasma shapes, ion beam emittance can be calculated by using separate standard deviations of positions and elevations angles. Ion beam emittance as a function of the curvature of the plasma meniscus for different plasma shapes ( flat, concave and convex ) without space charge at acceleration voltage varied from -5000 volt to +5000 volt applied to the acceleration electrode of the triode extraction system has been investigated. The influence of the extraction gap on ion beam emittance for a plasma concave shape of 3.75 mm without space charge at acceleration voltage, Vacc = -2000 volt applied to the acceleration electrode of the triode extraction system has been determined. Also the influence of space charge on ion beam emittance for variable plasma meniscus at acceleration voltage, Vacc = - 2000 volt applied to the acceleration electrode of the triode extraction system has been studied.

Simulation of the plasma meniscus with and without space charge using triode extraction system