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CaF2 films were grown on silicon using the neutral cluster beam deposition technique. These films were highly crystalline and c-axis oriented. Superconducting YBCO thin films were grown on the CaF2 buffered silicon using the laser ablation technique. These films showed Tc(onset) at 90K and Tc(zero) at 86K. X-ray diffraction analysis showed that the YBCO lms were also oriented along the c-axis.

Growth of YBCO superconducting thin films on CaF2 buffered silicon