English (United Kingdom)

https://curated-unify.zendy.io/wp-json/zendy-region/v1/featured_content/oa?rat=en

https://curated-unify.zendy.io/wp-json/zendy-region/v1/highlighted_journal/

Global: Zendy Plus annual

Presents the access of premium content as premium feature

Premium Content

Presents the keyphrase highlighting as premium feature

Keyphrase Highlighting

Presents the summarisation as premium feature

Summarisation

Insights

Presents the pdf analysis as premium feature

PDF Analysis

Presents the zaia usage as premium feature

ZAIA

Global: Zendy Tools annual

Global: Zendy Free Plan

Global: Zendy Tools monthly

Global: Zendy Plus monthly

E ects induced by cluster ions colliding with solids have been studied for many years. There is actually a renewal of interest due to new experimental possibilities. Thin lm deposition [1] shallow ion implantation [2], surface smoothing and polishing [3] with cluster beams have been developed in several laboratories [4]. Enhanced sputtering with clusters by comparison with single atoms has also been demonstrated long ago by Andersen and Bay [5] with Te and Te2 projectiles and later on by Beuhler and Friedmann [6] using large water clusters. The secondary emission yield from cluster impact is larger than the sum of the yields of individual atoms. The non linear e ects in the emission yield were also measured with Sb, Sb2, Sb3 at 30 keV/atom [6] and Bi, Bi2 at 45 keV/atom [7] bombarding metallic surfaces as Au and Ag. A review on non linear effects in sputtering was recently presented by Andersen [8]. A yield enhancement was also found for secondary ion emission. This was rst observed with dimers of Ne2 and Ar2 [9] and with small hydrogen cluster Hn [10]. Large non linear e ects in the emission of molecular ions from solid surfaces were an important nding [11, 12]. These authors emphasized the role of cluster projectiles (as SF6) for analytical applications in secondary ion mass spectrometry (SIMS), by comparison with single atomic ions of Cs or Xe. In order to investigate the mechanisms of secondary emission of neutrals and ions (clusters and molecular ions) by polyatomic projectiles and clusters, experiments have been performed at Orsay with projectiles over a large energy range (from keV to MeV per atom) and various types of targets (metals, insulating material as thin or thick organic layers). Cluster ion sources and accelerators were used. Most of the experiments were made in the event by event mode at the limit of single impacts on the target. Experiments with keV polyatomic projectiles were also performed at Texas A&M [13]. Actually cluster beams of SF5 and/or (CO2) are being used in SIMS on commercial instruments. The eld of mass spectrometry of organic molecules may gain considerably from these developments.

Desorption and sputtering from solids induced by polyatomic projectiles