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The coatings of FeAlCuCrCoMn high entropy alloy were deposited by direct current magnetron sputtering. The microstructure and the mechanical and corrosion properties of the coatings are investigated. A perfect dense and smooth coating could be obtained. The coatings exhibit single FCC solid solution as increasing deposited time. The thickness of the coatings increases with the increasing deposited time, the biggest thicknesses is 1.788 µm. The hardness and Young's modulus of the coatings are 17.5 and 186 GPa, respectively. All coatings exhibit better corrosion resistance than the 201 stainless steel in acidic alkali and salt corrosion mediums.

Microstructure and Properties of Coating of FeAlCuCrCoMn High Entropy Alloy Deposited by Direct Current Magnetron Sputtering