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We fabricated silicon nanowires (SiNWs) using a metalcatalyzed electroless etching method, which is known to be a low-cost and simple technique. The SiNW arrays with a length of 540 nm were used as a substrate of SiNWs/PEDOT:PSS hybrid solar cell. Furthermore, gold nanoparticles (AuNPs) were used to improve the light absorption of the device due to localized surface plasmon excitation. The results show that the short-circuit current density and the power conversion efficiency increased from 22.1 mA/cm2 to 26.0 mA/cm2 and 6.91% to 8.56%, respectively. The advantage of a higher interface area between the organic and inorganic semiconductors was established by using SiNW arrays and higher absorption light incorporated with AuNPs for improving the performance of the developed solar cell. key words: SiNWs, MCEE method, hybrid solar cell, PEDOT:PSS, AuNPs

Fabrication of Silicon Nanowires by Metal-Catalyzed Electroless Etching Method and Their Application in Solar Cell