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We propose a novel gain-matched VCSEL with a thermally actuated cantilever structure, which enables the lasing wavelength to be matched with a gain-peak wavelength even under wide temperature changes. The proposed structure includes an AlxOy layer in an air-gap cavity, which results in the increase of the temperature dependence of lasing wavelengths. The modeling result shows a potential of wide temperature operations of over 200K.

Proposal of gain-matched VCSELs with a thermally actuated MEMS structure for wide temperature operations