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In this paper a Lorentz force driven Micro ELectro Mechanical Sytems (MEMS) resonator fabricated on PolyMUMP process with optical and capacitive sensing is presented. The resonator is designed by combining the two poly layers which result in an increase in the thickness of the resonator. Lorentz force generates lateral displacements at low driving voltages which are proportional to the magnetic field and the input current. A displacement of more than 9.8 μm was achieved with a magnetic field of 0.12T and a driving current of 27mA. Magnetic sensitivity of 1.41V/T in air was experimentally measured using permanent magnets and capacitive sensing circuitry. Optical results demonstrate the sensitivity values between 0.090μm/mT and 0.074μm/mT.

Optical and capacitive characterization of MEMS magnetic resonator