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I fabricated an inverted-mesa quartz resonator having a 2.2-µm-thick vibrating area by wet etching. The resonator excited a 622-MHz-fundamental thickness vibration. By selecting a 30-nm-thick gold electrode, the temperature-frequency characteristics exhibited a cubic curve with a frequency deviation of 26ppm over a range of temperature from -40°C to +85°C. Furthermore, the resonator was miniaturized to reduce loss caused by the film resistance, and to decrease the parallel capacitance. The series resistance at the noninductive resonance frequency was 33ohm and the parallel capacitance was 0.96pF. Therefore, the fundamental thickness vibration had a wide inductive region.

Miniaturized ultrahigh frequency fundamental quartz resonators