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Erbium oxide (Er2O3) was shown to be a high potential candidate for tritium permeation barrier and electrical insulator coating for advanced breeding blanket systems such as liquid Li, Li-Pb or molten-salt blankets. Recently, we succeeded to form Er2O3 coating layer on large interior surface area of metal pipe using Metal Organic Chemical Vapor Deposition (MOCVD) process. In this paper, we investigated the microstructure of Er2O3  coating layer on stainless steel 316 (SUS 316) plate before and after heat treatments with hydrogen or argon gases. From the results of TEM observations, we confirmed that Er2O3  coating layer with 700 nm thickness was formed on the SUS 316 plate and this layer was identified to poly-crystal phase because the diffraction fleck which was arranged like a ring was observed in the selected electron diffraction pattern. No macroscopic defects such as crack and peeling in Er2O3  coating layer were observed before and after thermal cycling test. The change of microstructure of the Er2O3 coating layer on before and after heat cycling test was reported

Microstructure of Oxide Insulator Coating before and after Thermal Cycling Test