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In this study, a computational method of the kinetic model of carbon tetrafluoride (CF4) in wet argon gas under electron beam irradiation was developed. Using this method, the mechanism of decomposition and the optimum concentration of H2O during decomposition of CF4 was determined. It was found that 99% of 1000 ppm of CF4 of in atmospheric-pressure argon gas decomposed at an input energy density of 1 J/cm3 .

A Computational Study of the Decomposition of Carbon Tetrafluoride in Wet Argon under Electron Beam Irradiation