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A new formula has been derived to describe the energy spectrum of sputtered atoms from a target material bombarded by light ions. We assume that sputtered atoms bombarded by low-energy light ions are mainly primary knock-on atoms which are created by large-angle backscattered light ions. The escape processes of recoil atoms are estimated on the basis of the Falcone-Sigmund model. The new formula has the dependence on the incident energy of a projectile. We have compared the new formula with simulation results calculated with ACAT code for a Fe target material bombarded by 50 eV, 100 eV and 500 eV D + ions. Good agreements are found for 50 eV and100 eV D + ions.

A New Formula for Energy Spectrum of Sputtered Atoms Due to Low-Energy Light Ions