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Nano thin films of tin oxide are synthesized by sputtering for gas sensors application. The fabrication includes of deposition tin metal thin films on thermally oxidized SiO 2 followed by thermal oxidation at 300 o C, 400 o C, 500 o C and 600 o C in air. The effect of oxidized temperatures on the morphologies; microstructure and gas sensing properties are investigated. Tin oxide tin films showed very high sensitivity to NO x at ppm level. The nano thin film oxidized at 400 o C showed highest sensitivity compared to others.

The effects of oxidized temperatures on microstructures, electrical and gas sensing properties of tin oxide nano thin films