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. This paper reports on molecular sensing layer design of a piezoresistive can-tilever sensor for higher surface stress sensitivity. The proposed analyses show that theprevious understanding of piezoresistive cantilevers for surface stress measurement re-quires reconsideration for a cantilever utilizing polycrystalline silicon as a piezoresistor.The integration of the molecular sensing layer stripe pattern design to the cantilevereffectively improves the piezoresistive output and utilizes the full sensing area of thecantilever surface. The proposed sensing layer design can be effectively integrated to cur-rent piezoresistivecantilever sensors to improve sensor performance in biochemical assays.Keyword: piezoresistive cantilever sensors, surface stress sensitivity, biochemical assays. 1. INTRODUCTIONSurface stress is a well-known property of a solid surface [1]. Recently, a cantileverhas been applied as a versatile biochemical sensor for measurement of surface stress in-duced by hybridization of DNA, antibody-antigen binding, small ion detection, toxic gasdetection, and intermolecular interaction of self-assembling monolayers [2]. Different de-tection methods, including optical levers [3], as well as piezoresistive [4], piezoelectric [5],capacitance [6], and MOSFET devices [7], have been developed to measure the cantileverdeflection induced by surface stress change. Due to the prevalence of piezoresistors in thecurrent sensor market and their inherent advantages in microsystem integration,such as inmicrofluidic parts, piezoresistive detection is highly attractive in cantilever sensor design.However, the accompanying electrical noise in sensor operation, e.g. 1/f noise, poses aserious limitation to their application in performing biochemical assays [8]. The minimumdetectable surface stress for an optimal piezoresistive cantilever sensor should be in therange of 1 mN/m [9], which is at least one order of magnitude higher than that by opticallever detection. Hence, a primary driver for piezoresistive cantilever sensor design is toimprove the signal-to-noise ratio for surface stress measurement.As an intrinsic characteristic of isotropic surface stress loading, cantilever mechanicsdiffers from the widely-studied cases in AFM-based sensors for tip force measurement [10,11]. The effect of isotropic stress needs to be considered in sensor design. For piezore-sistive cantilever sensors having p-doped single-crystal silicon as the piezoresistor (i) the

Molecules sensing layer design of piezoresistive cantilever sensor for higher surface stress sensitivity