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Molecular beam epitaxy growth utilising an RF-plasma nitrogen source was used to study surface reconstruction and surface morphology of GaN on GaAs (001) at 580 °C. While both the nitrogen flow and plasma excitation power were constant, the grown layers were characterised as a function of Ga-flux. In the initial growth stage a (3×3) surface reconstruction was observed. This surface periodicity only lasted up to a maximum thickness of 2.5 ML, followed by a transition to the unreconstructed surface. Samples grown under N-rich, Ga-rich and stoichiometric conditions were characterised by high-resolution scanning electron microscopy and atomic force microscopy. We found that the smoothest surfaces were provided by the N/Ga-ratio giving the thickest layer at the (3×3)=&gt;(1×1) transition. The defect formation at the GaN/GaAs interface also depended on the N/Ga-flux ratio.

Surface Morphology of MBE-grown GaN on GaAs(001) as Function of the N/Ga-ratio