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Some possible applications of the low-angle mid-IR-light scattering techniqueand some recently developed on its basis methods for non-destructive inspectionand investigation of semiconductor materials and structures are discussed inthe paper. The conclusion is made that the techniques in question might be veryuseful for solving a large number of problems regarding defect investigationsand quality monitoring both in research laboratories and the industry ofmicroelectronics

Application of elastic mid-IR-laser-light scattering for non-destructive inspection in microelectronics