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Alex A. Volinsky Department of Mechanical Engineering, University of South Florida Tampa, Florida 33620 Stephen E. Saddow Department of Electrical Engineering, University of South Florida, Tampa, Florida 33620; and Department of Molecular Pharmacology and Physiology, University of South Florida, Tampa, Florida 33620 Francesco La Via IMM-CNR, sezione di Catania, Stradale Primosole 50, 95121, Catania, Italy

Stress nature investigation on heteroepitaxial 3C–SiC film on (100) Si substrates