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Wataru Yoshikawa Non-member (Kyoto University, wataru@nms.me.kyoto-u.ac.jp) Akio Sasabe Non-member (ROHM.CO.LTD, Akio.Sasabe@dsn.rohm.co.jp) Kouji Sugano Member (Kyoto University, sugano@me.kyoto-u.ac.jp) Toshiyuki Tsuchiya Member (Kyoto University, tutti@me.kyoto-u.ac.jp) Akira Ishida Non-member (National Institute for Material Science, ISHIDA.Akira@nims.go.jp) Osamu Tabata Senior Member (Kyoto University, tabata@me.kyoto-u.ac.jp)

Design Construction of Beam Structured Vertical Drive SMA Thin Film Actuator for Small Tactile Display