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We have developed a microdevice for cellular analysis integrated with a sample injector. μTAS has many advantages for cellular analysis due to its small dimension. Microwell for cell culture reduces dilution of cellular production, therefore high-sensitivity detection of the cellular production in the microwell is realized. Fig.1 shows schematic diagram of the microdevice. A microwell for cell culture and a sample injector using microvalves are integrated. In order to reduce dead volume in the sample injector, the sample injector is designed to minimize distance between the microwell and the sample injector. This device consists of a Pyrex bottom plate, a silicon body structure, and PDMS top structure. The silicon structure was formed by using CCP-RIE and Deep-RIE. The PDMS membrane for a valve diaphragm was spin coated and the lid part was molded with SU-8 mold master. For the PDMS structure, two types of PDMS are used for the lid of the microdevice and the diaphragm of the microvalves. These PDMS have an advantage of high transparency and that of bio-compatibility, respectively. To examine applicability of these PDMS for the microdevice, mechanical property and gas permeability of the two types of PDMS were evaluated. The result of mechanical property showed that the bio-compatible PDMS is suitable for the application of a microvalve diaphragm. The results of the gas permeability are shown in Table I. The results confirmed that the both PDMS have enough permeability of oxygen and carbon dioxide to supply the gases to cells in the microwell. Using the fabricated prototype device, sample injection was demonstrated. To visualize the sample injection, fluorescent dye was used as the sample. Sample injection operations were repeated and the captured images after each operation were shown in Fig.2. After ten operations, the sample of about 10nL was injected. This result indicated that the sample injection of the order of nano-liter was demonstrated successfully.

Development of a Microdevice for Cellular Analysis Integrated with Microvalves