Low Temperature Preparation of Functional Oxide Thin Film by Sol-gel-Hydrothermal Process-Application to Si ULSI Monolithic Process for Large-Scale Integrated Sensor, Actuator, and Memory- | Zendy

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Low Temperature Preparation of Functional Oxide Thin Film by Sol-gel-Hydrothermal Process-Application to Si ULSI Monolithic Process for Large-Scale Integrated Sensor, Actuator, and Memory-

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