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MEMS (Micro-ElectroMechanical Systems) are key technologies for manufacturing in many industrial regions. Today's rapid growth and commercialization of MEMS requires equally rapid product development. Virtual manufacturing, which is usually referred to as computer aided engineering (CAE), enables this rapid product development especially in MEMS world, because computer simulations can address the effect of miniaturization. In this paper, the process of virtual manufacturing on the computer is described step by step through a micro-mirror device, and the numerical result by a CAE tool is compared to the experimental ones obtained from real manufacturing.

MEMS PROCESS SIMULATION AND DEVICE ANALYSIS FOR AN ELECTRO-STATICALLY ACTUATED MICRO-MIRROR