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Shigeaki Tomonari, Member (Matsushita Electric Works, Ltd.) Takuro Ishida, Non Member (Matsushita Electric Works, Ltd.) Takuro Nakamura, Member(Mastushita Electric Works, Ltd.) Kazuya Nohara, Non Member (Matsushita Electric Works, Ltd.) Fumihiro Kasano, Non Member (Matsushita Electric Works, Ltd.) Motohide Okada, Non Member (Matsushita Electric Works, Ltd.) Kazusuke Maenaka, Member (Himeji Institute of Technology)

Vibrational Characteristics of a Silicon 3D Structure and the Consideration in Applications