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This paper presents a new reshaping technology which is suitable to realize real three dimensional silicon microstructures. In this process, the elastically deformed polysilicon structure is annealed by Joule heating generated by the current passing through the structure. Plastic deformation occurs resulting in permanent three dimensional shapes. The application of this basic process to different polysilicon structures is successfully performed. Some quantitative characteristics of the annealing effects are also investigated by means of structure deformation measurements.

Process Technology for Micromachines. The Reshaping Technology for Three Dimensional Polysilicon Microstructures.