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A pneumatic actuator has several advantages such as low heat generation, a high power-to-weight ratio, and low costs; however, it also has disadvantages such as time delays, nonlinearities, and position-dependent multiple pressure resonances. In this study, we propose a wave equation-based model, which can fit the position-dependent pressure resonances based on delay elements, taking into account the damping. Using this model, a wave cancellation filter is proposed for canceling all the resonances and anti-resonances. The effectiveness of both the model and the filter were verified through experiments.

Acoustic Wave Equation Based Modeling and Collocated Side Vibration Cancellation for Pneumatic Cylinder