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Seiji Hashimoto Member (Gunma University, seijiha@el.gunma-u.ac.jp) Kiyoshi Ohishi Member (Nagaoka University of Technology, ohishi@vos.nagaokaut.ac.jp) Koji Kosaka Non-member (Kumamoto University, kosaka kouji@tech-concierge.co.jp) Takeo Ishikawa Member (Gunma University, ishi@el.gunma-u.ac.jp) Hiroshi Kubota Non-member (Kumamoto University, kubota@eecs.kumamoto-u.ac.jp) Tadahiro Ohmi Member (Tohoku University, ohmi@fff.niche.tohoku.ac.jp)

A Friction Compensation Method in Positioning Control of Nonresonant Ultrasonic Actuator-Driven Precise Stage