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Recently, various machines and tools have been miniaturized. In this trend, the size of an actuator is a very important factor. An ultrasonic actuator is different from another actuator using electromagnet force in the driving principle. The structure of an ultrasonic piezoelectric actuator is simple. An ultrasonic actuator converts the ultrasonic mechanical energy to mechanical thrust force by a friction force. Based on this idea, various ultrasonic actuators were proposed and experimentally constructed.In this paper, the basic characteristics of a piezoelectric actuator were theoretically analyzed. The relationship between the thrust force and the weight force was clarified, and was verified by the experiments. Various prototypes of plane ultrasonic piezoelectric actuators were experimentally constructed, and the fundamental characteristics were measured.

Analysis of Plimary-on-Slider type Ultrasonic Piezoelectric Actuators, and Experiments on Multi-Degree-of Motion Freedom Plane Actuator.