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A Boltzmann Equation Analysis of Electron Swarm Parameters and Properties of Excited Particle Number Densities in Xe/Ne Plasmas -Laser Absorption EffectSatoshi Uchida, Student Member, Hirotake Sugawara, Member, Peter L. G. Ventzek, Member, and Yosuke Sakai, Member (HokkaidoUniversity) Xe/Ne plasmas are important for plasma display panels and VUV light sources. However, reactions between electrons and excited particles in the mixtures are so complicated that influence of the reactions on the plasma properties is not understood well. In this work, taking account of reactions through which electrons are produced, such as cumulative and Penning ionization, and of transition between excited levels, the electron and excited particle properties in Xe/Ne plasmas are calculated using the Boltzmann equation. The ionization coefficient and electron drift velocity agreed with experimental data. The influence of laser absorption in Xe/Ne plasmas on the plasma properties is also discussed.

denki gakkai rombunshi. a, kiso, zairyō, kyōtsū bumonshi/denki gakkai rombunshi. a, kiso zairyou kyoutsuu bumonshi

A Boltzmann Equation Analysis of Electron Swarm Parameters and Properties of Excited Particle Number Densities in Xe/Ne Plasmas -Laser Absorption Effect-