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To expand the field of ozone application, efficient ozone generation is the most important problem. A double discharge method, which generates diffuse glow discharge at atmospheric pressure, is used in the present research. This method has a larger discharge volume comparing with one of conventional method, such as silent discharge, surface discharge and so on. Thus we expect that it is possible to get a higher concentration and to be more efficient for ozone generation due to its discharge volume. An O2/N2 mixture (air) was employed as a raw gas for ozone generation and adjusted at 2.0 [l/min] for all measurements. To get the diffuse glow discharge a rapid rise time over 0.8 [kV/ns] was required for the applied voltage and this value gave good agreement with that obtained in previous investigations. The generated ozone concentration increased with discharge repetition frequency and at 35 [Hz], where the deposited power of 1.4 [W], the maximum generated ozone concentration of about 550 [ppm] was obtained.

Characteristics of Ozone Generation using a Double Discharge Type Ozonizer with High Repetition Frequency