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An Electron Cyclotron Resonance (ECR) ion source using a reentrant coaxial cavity was newly developed. The reentrant coaxial cavity force microwaves to propagate into the plasma from an annular window of a discharge chamber side wall. Four ring magnets were settled on a center conductor to produce a ring-cusp shaped magnetic field. Microwaves of 2.45GHz were introduced into the discharge chamber from stronger side of the magnetic field. The ion source of 8cm diameter discharge chamber was tested in this experiment. The minimum flow rate of sustaining plasma was 2 sccm for Ar and 10 sccm for N2 and O2 with high coupling efficiencies above 80%. The plasma density was higher than the cutoff density for Ar but lower for O2 and N2. The maximum ion beam current of 1.26mA/cm2 was obtained at a forward power of 304W of Ar.

Discharge Plasma Characteristics and Ion Beam Extraction on Electron Cyclotron Resonance (ECR) Ion Source Using Reentrant Coaxial Cavity