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Nitrogen atom densities in rare-gas diluted N2 plasmas are diagnosed by using Vacuum Ultra Violet Absorption Spectroscopy (VUVAS). The influence of rare-gas dilution for low pressure (20 mTorr) inductively coupled plasma is that N atom density shows a peak around 3 % of N2 fraction due to the increase of the high energy electrons. The N2 ion density, another precursor for nitridation, did not show a peak even for the high rare-gas fraction. On the other hand, capacitively coupled plasma operated at 0.5 Torr range showed no steep increase of N atom density. The optical diagnostics shows that rare-gas dilution of N2 plasma leads to the change of reactant flux ratio between neutral atoms and ions.

Nitrogen Atom Densities in Rare Gas Diluted N2 Plasmas with Capacitive and Inductive Coupling