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Evaluation of Si Nanowires through Device Characteristics and Improvement in Uniformity of Si Nanowire Width Using Self-limiting Oxidation Toshiyuki Tsutsumi, Non-member (Electrotechnical Laboratory, Meiji University, tsutsumi@etl.go.jp), Eiichi Suzuki, Non-member, Kenichi Ishii, Non-member, Seigo Kanemaru, Member, Hiroshi Hiroshima, Member, (Electrotechnical Laboratory), and Kazutaka Tomizawa, Non-member (Meiji University)